Micro and Nano Systems
نویسندگان
چکیده
منابع مشابه
. Micro and Nano Systems (mns)
In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...
متن کامل1 . Micro and Nano Systems ( MNS )
In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...
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A nanolaboratory—a prototype nanomanufacturing system—is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-offreedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a r...
متن کاملThe Nano–Micro Interface: Bridging Micro and Nano Worlds
By its very title, Nano-Micro Interface: Bridging Micro and Nano Worlds is a timely book for the field of nanotechnology. Since researchers can make microscale objects nanoscale (the top-down approach) as well as atomic and molecular species nanoscale (the bottom-up approach) are there applications in nanoscience and technology that can benefit, or be revolutionized, by combining both approache...
متن کاملPackaging and Interconnect for Micro- and Nano-scale Systems
Packaging and interconnect technologies are critical to the advancement of micro-scale and nano-scale systems. This paper will review some examples of our studies on flip-chip assembly, solder self-assembly, automated tuning and fixing, flexible circuits, atomic layer deposition and liquid crystal polymer for manufacturable and reliable microelectromechanical systems (MEMS). In addition, we wil...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2005
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.71.1201